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Deposition and structural characterization of ZrO2 and yttria-stabilized ZrO2 films by chemical vapor deposition
J.S. Kim, H.A. Marzouk, P.J. ReucroftVolume:
254
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)06274-o
File:
PDF, 655 KB
english, 1995