Thickness control of InP and In0.53 Ga0.47 As thin films by...

Thin Solid Films 1995 Vol. 256; Iss. 1-2

Thickness control of InP and In0.53 Ga0.47 As thin films by energy-dispersive X-ray spectrometry

E. Peiner, K. Hansen, A. Schlachetzki
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Volume:
256
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)06283-8
File:
PDF, 805 KB
english, 1995
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