Rapid thermal processed thin films of reactively sputtered Ta2O5
A. Pignolet, G.Mohan Rao, S.B. KrupanidhiVolume:
258
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)06322-2
File:
PDF, 695 KB
english, 1995