Low voltage-high current discharge of Ti vapour in high...

Thin Solid Films 1995 Vol. 256; Iss. 1-2

Low voltage-high current discharge of Ti vapour in high vacuum

H. Kajioka, K. Higuchi, M. Nakasone
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Volume:
256
Year:
1995
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(94)06387-7
File:
PDF, 3.09 MB
english, 1995
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