Structures of tantalum pentoxide thin films formed by...

Structures of tantalum pentoxide thin films formed by reactive sputtering of Ta metal

Peng-Heng Chang, Hung-Yu Liu
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Volume:
258
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(94)06402-4
File:
PDF, 1.19 MB
english, 1995
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