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A thermodynamic and experimental approach to ReSi2 LPCVD
A.-M. Dutron, E. Blanquet, N. Bourhila, R. Madar, C. BernardVolume:
259
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)06413-x
File:
PDF, 689 KB
english, 1995