Structural and optical properties of r.f.-sputtered SixC1 −...

Thin Solid Films 1995 Vol. 259; Iss. 1

Structural and optical properties of r.f.-sputtered SixC1 − x:O films

E. Ech-chamikh, E.L. Ameziane, A. Bennouna, M. Azizan, T.A. Nguyen Tan, T. Lopez-Rios
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Volume:
259
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)06426-1
File:
PDF, 727 KB
english, 1995
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