Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films
M. Penza, M.F. De Riccardis, L. Mirenghi, M.A. Tagliente, E. VeronaVolume:
259
Year:
1995
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(94)06450-4
File:
PDF, 690 KB
english, 1995