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Microcrystalline structure of poly-Si films prepared by cathode-type r.f. glow discharge
A.H. Jayatissa, M. Suzuki, Y. Nakanishi, Y. HatanakaVolume:
256
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)09291-5
File:
PDF, 496 KB
english, 1995