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Properties of liquid-phase-deposited SiO2 films for interlayer dielectrics in ultralarge-scale integrated circuit multilevel interconnections
Tetsuya Homma, Yukinobu MuraoVolume:
249
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)90079-5
File:
PDF, 613 KB
english, 1994