Non-selective copper film growth on Kapton (polyimide) by MOCVD
H.A. Marzouk, J.Y. Kim, J.S. Kim, P.J. Reucroft, R.J. Jacob, J.D. Robertson, C. EloiVolume:
249
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90080-9
File:
PDF, 609 KB
english, 1994