Direct current reactive magnetron sputtered zinc oxide thin...

Direct current reactive magnetron sputtered zinc oxide thin films —the effect of the sputtering pressure

Li-Jian Meng, M.P. dos Santos
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Volume:
250
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)90159-7
File:
PDF, 998 KB
english, 1994
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