Voids in epitaxial silicon films grown under different thermal conditions: void detection by thermal helium desorption
A. van Veen, A.H. Reader, D.J. Gravesteijn, A.A. van GorkumVolume:
241
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90427-8
File:
PDF, 433 KB
english, 1994