Amorphous hydrogenated carbon films elaborated by plasma-assisted chemical vapour deposition: characterization of composition by nuclear methods
L. Deshayes, M. Charbonnier, M. Romand, T. Petit, N. Chevarier, A. ChevarierVolume:
241
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90438-3
File:
PDF, 400 KB
english, 1994