Low temperature selective growth of epitaxial Si and...

Low temperature selective growth of epitaxial Si and Si1−xGex layers from SiH4 and GeH4 in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor: kinetics and possibilities

M. Caymax, J. Poortmans, A. Van Ammel, M. Libezny, J. Nijs, R. Mertens
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
241
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90450-2
File:
PDF, 449 KB
english, 1994
Conversion to is in progress
Conversion to is failed