Mechanisms and reactions during atomic layer deposition on...

Coordination Chemistry Reviews 2013 / 12 Vol. 257; Iss. 23-24

Mechanisms and reactions during atomic layer deposition on polymers

Parsons, Gregory N., Atanasov, Sarah E., Dandley, Erinn C., Devine, Christina K., Gong, Bo, Jur, Jesse S., Lee, Kyoungmi, Oldham, Christopher J., Peng, Qing, Spagnola, Joseph C., Williams, Philip S.
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Volume:
257
Language:
english
Journal:
Coordination Chemistry Reviews
DOI:
10.1016/j.ccr.2013.07.001
Date:
December, 2013
File:
PDF, 2.14 MB
english, 2013
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