Fabrication of diffractive microlens array by femtosecond...

Microelectronic Engineering 2012 / 10 Vol. 98

Fabrication of diffractive microlens array by femtosecond laser-assisted etching process

Luo, Shao-Wei, Chang, Tien-Li, Tsai, Hung-Yin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.024
Date:
October, 2012
File:
PDF, 859 KB
english, 2012
Conversion to is in progress
Conversion to is failed