Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements
A. Pérez-Rodríguez, E. Roca, T. Jawhari, J.R. Morante, R.J. SchreutelkampVolume:
251
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90839-7
File:
PDF, 574 KB
english, 1994