Microcrystalline silicon carbon alloy film prepared by...

Thin Solid Films 1994 Vol. 245; Iss. 1-2

Microcrystalline silicon carbon alloy film prepared by photo-chemical vapour deposition

Sukriti Ghosh, Abhijit De, Swati Ray
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Volume:
245
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90906-7
File:
PDF, 522 KB
english, 1994
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