OES study of plasma processes in d.c. discharge during...

Diamond and Related Materials 1994 / 11 Vol. 3; Iss. 11-12

OES study of plasma processes in d.c. discharge during diamond film deposition

Polushkin, V.M., Rakhimov, A.T., Samorodov, V.A., Suetin, N.V., Timofeyev, M.A.
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Volume:
3
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(94)90155-4
Date:
November, 1994
File:
PDF, 325 KB
english, 1994
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