High-resolution Auger depth profiling of multilayer structures MoSi, MoB4C, NiC
S.S. Andreev, A.D. Akhsakhalyan, M.N. Drozdov, N.I. Polushkin, N.N. SalashchenkoVolume:
263
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06537-7
File:
PDF, 644 KB
english, 1995