Influence of surface carbon on the formation of...

Thin Solid Films 1995 Vol. 266; Iss. 2

Influence of surface carbon on the formation of silicon-refractory metal interfaces

N.R. Gall, E.V. Rut'kov, A.Ya. Tontegode
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Volume:
266
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06572-5
File:
PDF, 556 KB
english, 1995
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