Epitaxial metal silicides: interface mapping by scanning...

Epitaxial metal silicides: interface mapping by scanning probe techniques

H. von Känel, E.Y. Lee, H. Sirringhaus, U. Kafader
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Volume:
267
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06594-6
File:
PDF, 752 KB
english, 1995
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