![](/img/cover-not-exists.png)
Plasma-assisted deposition of tungsten-containing siloxane thin films
F. Fracassi, R. d'Agostino, F. Palumbo, F. Bellucci, T. MonettaVolume:
264
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06600-4
File:
PDF, 588 KB
english, 1995