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The formation of sputtered Ta/a-Si and a-Si/Ta interfaces in a-Si/Ta/a-Si/c-Si structure
Y. Ijdiyaou, K. Hafidi, M. Azizan, E.L. Ameziane, G. Patrat, M. Brunel, L. Ortega, T.A.Nguyen TanVolume:
266
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06643-8
File:
PDF, 516 KB
english, 1995