Thermal dry-etching of copper using hydrogen peroxide and hexafluoroacetylacetone
Ajay Jain, T.T. Kodas, M.J. Hampden-SmithVolume:
269
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06877-5
File:
PDF, 649 KB
english, 1995