Controlled crystallization of LPCVD amorphous silicon

Thin Solid Films 1996 Vol. 272; Iss. 1

Controlled crystallization of LPCVD amorphous silicon

Harland G. Tompkins, Ken Seddon, Lisa K. Garling, Peter Fejes
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Volume:
272
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06979-8
File:
PDF, 601 KB
english, 1996
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