The influence of the argon pressure and substrate...

The influence of the argon pressure and substrate temperature on the structure of r.f.-sputtered CrNi(65:35), CrNi(50:50) and CrNi(20:80) thin films

M.I. Birjega, M. Alexe
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Volume:
275
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(95)07030-3
File:
PDF, 404 KB
english, 1996
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