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Metallisation of porous silicon by chemical vapour infiltration and deposition
B.J Aylett, I.S Harding, L.G Earwaker, K Forcey, T GiadduiVolume:
276
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)08065-1
File:
PDF, 476 KB
english, 1996