Formation of porous silicon on patterned substrates
M Krüger, R Arens-Fischer, M Thönissen, H Münder, M.G Berger, H Lüth, S Hilbrich, W TheissVolume:
276
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)08066-x
File:
PDF, 860 KB
english, 1996