Effects of heavy plasma atoms on spin centers in reactively...

Thin Solid Films 1996 Vol. 278; Iss. 1-2

Effects of heavy plasma atoms on spin centers in reactively sputtered SiN films

Iwao Sugimoto, Hiroki Kuwano, Satoko Nakano
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
278
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)08164-x
File:
PDF, 678 KB
english, 1996
Conversion to is in progress
Conversion to is failed