Implantation effect of diamond-like carbon films by 110 keV...

Implantation effect of diamond-like carbon films by 110 keV nitrogen ions

W.J. Wang, T.M. Wang, C. Jing
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Volume:
280
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)08180-1
File:
PDF, 628 KB
english, 1996
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