Plasma-enhanced chemical vapour deposition of thin films...

Thin Solid Films 1996 Vol. 280; Iss. 1-2

Plasma-enhanced chemical vapour deposition of thin films from tetraethoxysilane and methanol: optical properties and XPS analyses

L. Zajíčkova, I. Ohlídal, J. Janča
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Volume:
280
Year:
1996
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(95)08185-2
File:
PDF, 997 KB
english, 1996
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