Mechanical properties of a-C:H and a-C:H/SiOx nanocomposite thin films prepared by ion-assisted plasma-enhanced chemical vapor deposition
Jung H. Lee, Dong S. Kim, Young H. Lee, Bakhtier FaroukVolume:
280
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(95)08202-6
File:
PDF, 1.05 MB
english, 1996