Comparison between newly developed and classical...

Comparison between newly developed and classical determinations of index and thickness of thin films on substrates by ellipsometry

T. Easwarakhanthan, M. Remy
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Volume:
280
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)08223-9
File:
PDF, 715 KB
english, 1996
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