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High-reliability interconnection formation by a two-step switching bias sputtering process
Jin Onuki, Masayasu Nihei, Masahiro KoizumiVolume:
266
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(96)80021-6
File:
PDF, 673 KB
english, 1995