Fabrication of Lateral Porous Silicon Membranes for Planar Microfluidic Devices
Dubosc, Fabrice, Bourrier, David, Leichlé, ThierryVolume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.268
File:
PDF, 487 KB
english, 2012