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Structural and optical properties of silicon thin-films deposited by hot-wire chemical vapor deposition: The effects of silane concentrations
Panchal, A.K., Beladiya, Vivek, Kheraj, VipulVolume:
542
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.06.098
Date:
September, 2013
File:
PDF, 971 KB
english, 2013