High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure
Wang, Chao-Lung, Lee, I-Che, Wu, Chun-Yu, Cheng, Yu-Ting, Yang, Po-Yu, Cheng, Huang-ChungVolume:
529
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.09.048
Date:
February, 2013
File:
PDF, 1.27 MB
english, 2013