In situ diagnosis of chemical species for the growth of...

Diamond and Related Materials 2002 / 1 Vol. 11; Iss. 1

In situ diagnosis of chemical species for the growth of carbon nanotubes in microwave plasma-enhanced chemical vapor deposition

Woo, Yun Sung, Jeon, Duk Young, Han, In Taek, Lee, Nae Sung, Jung, Jae Eun, Kim, Jong Min
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Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00519-2
Date:
January, 2002
File:
PDF, 1.20 MB
english, 2002
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