Characteristics of fast ions from laser-induced plasma and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 11 Vol. 314

Characteristics of fast ions from laser-induced plasma and their applicability to shallow junction doping

Sekioka, Tsuguhisa, Amano, Sho, Inoue, Tomoaki, Mochizuki, Takayasu
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Volume:
314
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.04.065
Date:
November, 2013
File:
PDF, 1.15 MB
english, 2013
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