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Fabrication of flexible metallic wire grid polarizer using thermal NIL and lift-off processes
Wu, Chien-Li, Yao, Po-Hung, Lin, Chih-Hsien, Sung, Cheng-Kuo, Chen, Cheng-HuanVolume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.081
Date:
October, 2012
File:
PDF, 538 KB
english, 2012