Influence of moisture on BCN (low-K) film for...

Diamond and Related Materials 2008 / 4 Vol. 17; Iss. 4-5

Influence of moisture on BCN (low-K) film for interconnection reliability

Aoki, Hidemitsu, Watanabe, Daisuke, Moriyama, Ryota, Mazumder, M.K., Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.08.043
Date:
April, 2008
File:
PDF, 383 KB
english, 2008
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