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Impurity and defect incorporation in diamond films deposited at low substrate temperatures
Stiegler, J., Bergmaier, A., Michler, J., von Kaenel, Y., Dollinger, G., Blank, E.Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00164-7
Date:
February, 1998
File:
PDF, 1.31 MB
english, 1998