Effective reduction of AlN defect luminescence by fluorine...

Diamond and Related Materials 2011 / 5 Vol. 20; Iss. 5-6

Effective reduction of AlN defect luminescence by fluorine implantation

Vetter, Ulrich, Müller, Sven, Brötzmann, Marc, Hofsäss, Hans, Gruber, John B.
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Volume:
20
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.03.038
Date:
May, 2011
File:
PDF, 405 KB
english, 2011
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