Growth and characterization of boron carbon nitride films...

Diamond and Related Materials 2003 / 3 Vol. 12; Iss. 3-7

Growth and characterization of boron carbon nitride films with low dielectric constant

Tai, Tomoyoshi, Sugiyama, Tomohiko, Sugino, Takashi
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00344-8
Date:
March, 2003
File:
PDF, 144 KB
english, 2003
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