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Evaluation of etching on amorphous carbon films in nitric acid
Sasaki, Yasushi, Takeda, Aoi, Kiyoto,, Ohshio, Shigeo, Akasaka, Hiroki, Nakano, Masayuki, Saitoh, HidetoshiVolume:
24
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.12.006
Date:
April, 2012
File:
PDF, 434 KB
english, 2012