Experimental and computational investigation of chemical...

Surface and Coatings Technology 2013 / 09 Vol. 230

Experimental and computational investigation of chemical vapor deposition of Cu from Cu amidinate

Aviziotis, Ioannis G., Cheimarios, Nikolaos, Vahlas, Constantin, Boudouvis, Andreas G.
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Volume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.014
Date:
September, 2013
File:
PDF, 824 KB
english, 2013
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