Deposition of DLC films in CH4/Ne and CH4/Kr r.f. plasmas

Diamond and Related Materials 1997 / 4 Vol. 6; Iss. 5-7

Deposition of DLC films in CH4/Ne and CH4/Kr r.f. plasmas

Mutsukura, Nobuki, Yoshida, Katsu-ichi
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(96)00641-3
Date:
April, 1997
File:
PDF, 665 KB
english, 1997
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