Micro-structural analysis of carbon nitride (CNx) film...

Diamond and Related Materials 2002 / 3 Vol. 11; Iss. 3-6

Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering

Jung, Hae-Suk, Park, Hyung-Ho
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Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00019-5
Date:
March, 2002
File:
PDF, 437 KB
english, 2002
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